JPS6120513B2 - - Google Patents

Info

Publication number
JPS6120513B2
JPS6120513B2 JP1168278A JP1168278A JPS6120513B2 JP S6120513 B2 JPS6120513 B2 JP S6120513B2 JP 1168278 A JP1168278 A JP 1168278A JP 1168278 A JP1168278 A JP 1168278A JP S6120513 B2 JPS6120513 B2 JP S6120513B2
Authority
JP
Japan
Prior art keywords
vacuum chamber
thin film
vapor
substrate
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1168278A
Other languages
English (en)
Japanese (ja)
Other versions
JPS54104489A (en
Inventor
Tsuneo Tanaka
Seiichi Nagata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP1168278A priority Critical patent/JPS54104489A/ja
Publication of JPS54104489A publication Critical patent/JPS54104489A/ja
Publication of JPS6120513B2 publication Critical patent/JPS6120513B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
JP1168278A 1978-02-03 1978-02-03 Method and apparatus for growing thin film Granted JPS54104489A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1168278A JPS54104489A (en) 1978-02-03 1978-02-03 Method and apparatus for growing thin film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1168278A JPS54104489A (en) 1978-02-03 1978-02-03 Method and apparatus for growing thin film

Publications (2)

Publication Number Publication Date
JPS54104489A JPS54104489A (en) 1979-08-16
JPS6120513B2 true JPS6120513B2 (en]) 1986-05-22

Family

ID=11784767

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1168278A Granted JPS54104489A (en) 1978-02-03 1978-02-03 Method and apparatus for growing thin film

Country Status (1)

Country Link
JP (1) JPS54104489A (en])

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225512U (en]) * 1988-08-02 1990-02-20
JPH0413612U (en]) * 1990-05-25 1992-02-04

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0225512U (en]) * 1988-08-02 1990-02-20
JPH0413612U (en]) * 1990-05-25 1992-02-04

Also Published As

Publication number Publication date
JPS54104489A (en) 1979-08-16

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